发明授权
- 专利标题: Method for pattern formation
- 专利标题(中): 图案形成方法
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申请号: US11727158申请日: 2007-03-23
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公开(公告)号: US07931819B2公开(公告)日: 2011-04-26
- 发明人: Naoko Kihara , Hiroyuki Hieda
- 申请人: Naoko Kihara , Hiroyuki Hieda
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Nixon & Vanderhye, PC
- 优先权: JP2006-221555 20060815
- 主分类号: H01L21/302
- IPC分类号: H01L21/302
摘要:
There is provided a method for pattern formation, including a step of coating a composition comprising a block copolymer, a silicon compound, and a solvent for dissolving these components onto an object to form a layer of the composition on the object, a step of subjecting the layer of the composition to self-organization of the block copolymer to cause phase separation into a first phase, in which the silicon compound is localized, having higher etching resistance by heat treatment or/and oxygen plasma treatment, and a second phase comprising a polymer phase and having lower etching resistance by heat treatment or/and oxygen plasma treatment, and thereby forming a pattern layer with a fine pattern, and a step of etching the object using as a mask the thus formed pattern layer.
公开/授权文献
- US20080041818A1 Method for pattern formation 公开/授权日:2008-02-21
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