发明授权
- 专利标题： Methodology of improving the manufacturability of laser anneal
- 专利标题（中）： 提高激光退火可制造性的方法
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申请号： US11743440申请日： 2007-05-02
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公开(公告)号： US07932139B2公开(公告)日： 2011-04-26
- 发明人: Haowen Bu , Amitabh Jain
- 申请人： Haowen Bu , Amitabh Jain
- 申请人地址： US TX Dallas
- 专利权人： Texas Instruments Incorporated
- 当前专利权人： Texas Instruments Incorporated
- 当前专利权人地址： US TX Dallas
- 代理商 Warren L. Franz; Wade J. Brady, III; Frederick J. Telecky, Jr
- 主分类号： H01L21/268
- IPC分类号： H01L21/268 ; B23K26/00
摘要：
A method of laser annealing a workpiece for reduction of warpage, slip defects and breakage, the method comprising (a) moving a workpiece through a laser beam in a x-axis first direction, (b) moving the workpiece in a y-axis second direction, (c) moving the workpiece through a laser beam in a minus x-axis first direction and repeating (a)-(c) until the workpiece is fully annealed in two successive laser annealing iterations.
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