发明授权
- 专利标题: Current constricting phase change memory element structure
- 专利标题(中): 电流限制相变存储元件结构
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申请号: US12727672申请日: 2010-03-19
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公开(公告)号: US07932507B2公开(公告)日: 2011-04-26
- 发明人: Chieh-Fang Chen , Shih Hung Chen , Yi-Chou Chen , Thomas Happ , Chia Hua Ho , Ming-Hsiang Hsueh , Chung Hon Lam , Hsiang-Lan Lung , Jan Boris Philipp , Simone Raoux
- 申请人: Chieh-Fang Chen , Shih Hung Chen , Yi-Chou Chen , Thomas Happ , Chia Hua Ho , Ming-Hsiang Hsueh , Chung Hon Lam , Hsiang-Lan Lung , Jan Boris Philipp , Simone Raoux
- 申请人地址: US NY Armonk US NC Cary TW
- 专利权人: International Business Machines Corporation,Qimonda North America Corp.,Macronix International Co., Ltd.
- 当前专利权人: International Business Machines Corporation,Qimonda North America Corp.,Macronix International Co., Ltd.
- 当前专利权人地址: US NY Armonk US NC Cary TW
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 Vazken Alexanian
- 主分类号: H01L29/02
- IPC分类号: H01L29/02
摘要:
A layer of nanoparticles having a dimension on the order of 10 nm is employed to form a current constricting layer or as a hardmask for forming a current constricting layer from an underlying insulator layer. The nanoparticles are preferably self-aligning and/or self-planarizing on the underlying surface. The current constricting layer may be formed within a bottom conductive plate, within a phase change material layer, within a top conductive plate, or within a tapered liner between a tapered via sidewall and a via plug contains either a phase change material or a top conductive material. The current density of the local structure around the current constricting layer is higher than the surrounding area, thus allowing local temperature to rise higher than surrounding material. The total current required to program the phase change memory device, and consequently the size of a programming transistor, is reduced due to the current constricting layer.
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