发明授权
- 专利标题: Carbon nanotube conductor for trench capacitors
- 专利标题(中): 碳纳米管导体用于沟槽电容器
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申请号: US10596022申请日: 2003-12-18
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公开(公告)号: US07932549B2公开(公告)日: 2011-04-26
- 发明人: Steven J. Holmes , Toshiharu Furukawa , Mark C. Hakey , David V. Horak , Charles W. Koburger, III , Larry A. Nesbit
- 申请人: Steven J. Holmes , Toshiharu Furukawa , Mark C. Hakey , David V. Horak , Charles W. Koburger, III , Larry A. Nesbit
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Yuanmin Cai
- 国际申请: PCT/US03/40295 WO 20031218
- 国际公布: WO2005/069372 WO 20050728
- 主分类号: H01L27/108
- IPC分类号: H01L27/108
摘要:
A trench-type storage device includes a trench in a substrate (100), with bundles of carbon nanotubes (202) lining the trench and a trench conductor (300) filling the trench. A trench dielectric (200) may be formed between the carbon nanotubes and the sidewall of the trench. The bundles of carbon nanotubes form an open cylinder structure lining the trench. The device is formed by providing a carbon nanotube catalyst structure on the substrate and patterning the trench in the substrate; the carbon nanotubes are then grown down into the trench to line the trench with the carbon nanotube bundles, after which the trench is filled with the trench conductor.
公开/授权文献
- US20090014767A1 CARBON NANOTUBE CONDUCTOR FOR TRENCH CAPACITORS 公开/授权日:2009-01-15