Invention Grant
- Patent Title: Rapidly cleanable electroplating cup assembly
- Patent Title (中): 快速清洁电镀杯组装
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Application No.: US11932595Application Date: 2007-10-31
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Publication No.: US07935231B2Publication Date: 2011-05-03
- Inventor: Shantinath Ghongadi , Robert Rash , Jeff Hawkins , Seshasayee Varadarajan , Tariq Majid , Kousik Ganesan , Bryan Buckalew , Brian Evans
- Applicant: Shantinath Ghongadi , Robert Rash , Jeff Hawkins , Seshasayee Varadarajan , Tariq Majid , Kousik Ganesan , Bryan Buckalew , Brian Evans
- Applicant Address: US CA San Jose
- Assignee: Novellus Systems, Inc.
- Current Assignee: Novellus Systems, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Knobbe, Martens, Olson & Bear, LLP
- Main IPC: C25B9/02
- IPC: C25B9/02 ; C25D17/06

Abstract:
Embodiments of a closed-contact electroplating cup assembly that may be rapidly cleaned while an electroplating system is on-line are disclosed. One disclosed embodiment comprises a cup assembly and a cone assembly, wherein the cup assembly comprises a cup bottom comprising an opening, a seal surrounding the opening, an electrical contact structure comprising a plurality of electrical contacts disposed around the opening, and an interior cup side that is tapered inwardly in along an axial direction of the cup from a cup top toward the cup bottom.
Public/Granted literature
- US20090107835A1 Rapidly Cleanable Electroplating Cup Assembly Public/Granted day:2009-04-30
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