发明授权
- 专利标题: Rapidly cleanable electroplating cup assembly
- 专利标题(中): 快速清洁电镀杯组装
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申请号: US11932595申请日: 2007-10-31
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公开(公告)号: US07935231B2公开(公告)日: 2011-05-03
- 发明人: Shantinath Ghongadi , Robert Rash , Jeff Hawkins , Seshasayee Varadarajan , Tariq Majid , Kousik Ganesan , Bryan Buckalew , Brian Evans
- 申请人: Shantinath Ghongadi , Robert Rash , Jeff Hawkins , Seshasayee Varadarajan , Tariq Majid , Kousik Ganesan , Bryan Buckalew , Brian Evans
- 申请人地址: US CA San Jose
- 专利权人: Novellus Systems, Inc.
- 当前专利权人: Novellus Systems, Inc.
- 当前专利权人地址: US CA San Jose
- 代理机构: Knobbe, Martens, Olson & Bear, LLP
- 主分类号: C25B9/02
- IPC分类号: C25B9/02 ; C25D17/06
摘要:
Embodiments of a closed-contact electroplating cup assembly that may be rapidly cleaned while an electroplating system is on-line are disclosed. One disclosed embodiment comprises a cup assembly and a cone assembly, wherein the cup assembly comprises a cup bottom comprising an opening, a seal surrounding the opening, an electrical contact structure comprising a plurality of electrical contacts disposed around the opening, and an interior cup side that is tapered inwardly in along an axial direction of the cup from a cup top toward the cup bottom.
公开/授权文献
- US20090107835A1 Rapidly Cleanable Electroplating Cup Assembly 公开/授权日:2009-04-30
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