Invention Grant
US07935632B2 Reduced metal pipe formation in metal silicide contacts 有权
减少金属硅化物接触中的金属管形成

Reduced metal pipe formation in metal silicide contacts
Abstract:
Formation of metal pipes resulting from formation of metal silicide contacts are reduced or avoided. To reduce formation of metal pipes, an epitaxial layer is formed over the diffusion region on which the metal silicide contact is formed. The epitaxial layer reduces defects which enhances diffusion of metal atoms or molecules.
Public/Granted literature
Information query
Patent Agency Ranking
0/0