发明授权
US07936114B2 Piezoelectric vibrator manufacturing method, piezoelectric vibrator, oscillator, electronic device, and radio-controlled watch
失效
压电振动器制造方法，压电振子，振荡器，电子装置和无线电控制手表
- 专利标题： Piezoelectric vibrator manufacturing method, piezoelectric vibrator, oscillator, electronic device, and radio-controlled watch
- 专利标题（中）： 压电振动器制造方法，压电振子，振荡器，电子装置和无线电控制手表
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申请号： US12853659申请日： 2010-08-10
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公开(公告)号： US07936114B2公开(公告)日： 2011-05-03
- 发明人: Masashi Numata , Kiyoshi Aratake , Kazuyoshi Sugama , Sumihiko Kurita
- 申请人： Masashi Numata , Kiyoshi Aratake , Kazuyoshi Sugama , Sumihiko Kurita
- 申请人地址： JP Chiba
- 专利权人： Seiko Instruments Inc.
- 当前专利权人： Seiko Instruments Inc.
- 当前专利权人地址： JP Chiba
- 代理机构： Brinks Hoffer Gilson & Lione
- 优先权： JP2008-036421 20080218; JP2008-164663 20080624
- 主分类号： H01L41/047
- IPC分类号： H01L41/047 ; H01L41/053
摘要：
The piezoelectric vibrator of the invention comprises a base substrate, a lid substrate in which cavity recesses are formed and which is bonded to the base substrate in such a state that the recesses face the base substrate, a piezoelectric vibration member bonded to the upper face of the base substrate in such a state that it is housed in the cavity formed of the recess between the base substrate and the lid substrate, an external electrode formed on the lower face of the base substrate, a through-electrode formed in and through the base substrate and electrically connected with the external electrode with keeping the airtightness inside the cavity, and a routing electrode formed on the upper face of the base substrate to electrically connect the through-electrode to the bonded piezoelectric vibration member; wherein the through-electrode is formed through hardening of a paste containing a plurality of metal fine particles and a plurality of glass beads.
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