发明授权
- 专利标题: Ultrasonic bonding apparatus
- 专利标题(中): 超声波接合装置
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申请号: US12564423申请日: 2009-09-22
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公开(公告)号: US07938160B2公开(公告)日: 2011-05-10
- 发明人: Yasuyuki Masuda , Yukio Ozaki , Jun Matsueda , Kazuyuki Ikura , Taizan Kobayashi , Toshinori Kasuga
- 申请人: Yasuyuki Masuda , Yukio Ozaki , Jun Matsueda , Kazuyuki Ikura , Taizan Kobayashi , Toshinori Kasuga
- 申请人地址: JP Kawasaki
- 专利权人: Fujitsu Limited
- 当前专利权人: Fujitsu Limited
- 当前专利权人地址: JP Kawasaki
- 代理机构: Westerman, Hattori, Daniels & Adrian, LLP
- 主分类号: B32B37/00
- IPC分类号: B32B37/00
摘要:
An ultrasonic bonding apparatus includes an ultrasonic bonding unit, and a wiping unit configured to wipe out pre-cured underfill that has adhered to a tool surface of a head, by using a wiping member. The ultrasonic bonding unit includes a first driver configured to drive the head to press an electronic component upon a substrate, and an ultrasonic generator. The wiping unit includes a wiping table used to wipe out the tool surface, a feed mechanism configured to supply a wiping member to the wiping table and to roll up the wiping member, a cartridge configured to house the wiping table and the feed mechanism, and a second driver configured to drive the cartridge in the plane. The first driver is configured to press the head upon the wiping member on the wiping table.
公开/授权文献
- US20100038406A1 ULTRASONIC BONDING APPARATUS 公开/授权日:2010-02-18
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