Invention Grant
- Patent Title: Back-end-of-line resistive semiconductor structures
- Patent Title (中): 后端电阻半导体结构
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Application No.: US12191683Application Date: 2008-08-14
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Publication No.: US07939911B2Publication Date: 2011-05-10
- Inventor: Wagdi W. Abadeer , Kiran V. Chatty , Robert J. Gauthier, Jr. , Jed H. Rankin , Robert Robison , Yun Shi , William R. Tonti
- Applicant: Wagdi W. Abadeer , Kiran V. Chatty , Robert J. Gauthier, Jr. , Jed H. Rankin , Robert Robison , Yun Shi , William R. Tonti
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Anthony J. Canale
- Main IPC: H01L29/00
- IPC: H01L29/00

Abstract:
In one embodiment, a back-end-of-line (BEOL) resistive structure comprises a second metal line embedded in a second dielectric layer and overlying a first metal line embedded in a first dielectric layer. A doped semiconductor spacer or plug laterally abutting sidewalls of the second metal line and vertically abutting a top surface of the first metal line provides a resistive link between the first and second metal lines. In another embodiment, another BEOL resistive structure comprises a first metal line and a second metal line are embedded in a dielectric layer. A doped semiconductor spacer or plug laterally abutting the sidewalls of the first and second metal lines provides a resistive link between the first and second metal lines.
Public/Granted literature
- US20100038754A1 Back-End-of-Line Resistive Semiconductor Structures Public/Granted day:2010-02-18
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