发明授权
- 专利标题: Carrier of reticle pod and the fixing element thereof
- 专利标题(中): 光罩荚的载体及其固定元件
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申请号: US12247316申请日: 2008-10-08
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公开(公告)号: US07942269B2公开(公告)日: 2011-05-17
- 发明人: Pao-Yi Lu
- 申请人: Pao-Yi Lu
- 申请人地址: TW Shulin
- 专利权人: Gudeng Precision Industrial Co., Ltd
- 当前专利权人: Gudeng Precision Industrial Co., Ltd
- 当前专利权人地址: TW Shulin
- 代理机构: Sinorica, LLC
- 代理商 Ming Chow
- 优先权: TW97129989A 20080807
- 主分类号: B65D85/30
- IPC分类号: B65D85/30 ; B65D81/02
摘要:
This invention is related to a carrier of reticle pod. The carrier of reticle pod comprises an upper cover and a lower cover, and the upper cover is configured to be coupled to the lower cover to form an interior space for accommodation. The lower cover includes several pairs of guide tracks disposed on two opposite lateral sides of inner surface of the lower cover. Clapboards are set into the lower cover via the guide tracks to separate the space for accommodation into a plurality of spaces for accommodation for storing reticle pod. Fixing elements including a clipping portion and a resisting portion are disposed on the top surface of the inner surface of upper cover. When the upper cover closes the lower cover, each fixing element of the upper cover is configured to be coupled to each reticle pod stored in the carrier.
公开/授权文献
- US20100032331A1 Carrier of reticle pod and the fixing element thereof 公开/授权日:2010-02-11
信息查询
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