发明授权
US07942508B2 Decreased actuation voltage in MEMS devices by constraining membrane displacement without using conductive “landing pad”
有权
通过限制膜位移而不使用导电“着陆垫”来降低MEMS器件中的致动电压
- 专利标题： Decreased actuation voltage in MEMS devices by constraining membrane displacement without using conductive “landing pad”
- 专利标题（中）： 通过限制膜位移而不使用导电“着陆垫”来降低MEMS器件中的致动电压
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申请号： US12164349申请日： 2008-06-30
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公开(公告)号： US07942508B2公开(公告)日： 2011-05-17
- 发明人: Joseph A. Degroot , Peter Michael Gulvin , Jun Ma
- 申请人： Joseph A. Degroot , Peter Michael Gulvin , Jun Ma
- 申请人地址： US CT Norwalk
- 专利权人： Xerox Corporation
- 当前专利权人： Xerox Corporation
- 当前专利权人地址： US CT Norwalk
- 代理机构： MH2 Technology Law Group LLP
- 主分类号： B41J2/045
- IPC分类号： B41J2/045
摘要：
The present application is directed to electrostatic actuators, and methods of making electrostatic actuators. In one embodiment, an electrostatic actuator of the present application can include an electrode layer and a mechanical member. The electrode layer can include a removed portion that is free of a landing pad. The mechanical member can be positioned in proximity to the electrode layer so as to provide a gap therebetween. The mechanical member can further include a dimple structure protruding out into the gap and aligned with the removed portion of the electrode layer. When in operation, the mechanical member can be capable of deflecting toward the electrode layer. The electrostatic actuator can be used in a fluid drop ejector for ink jet recording or printing devices.