发明授权
- 专利标题: Three-dimensional microprobe array
- 专利标题(中): 三维微探针阵列
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申请号: US12128804申请日: 2008-05-29
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公开(公告)号: US07946050B2公开(公告)日: 2011-05-24
- 发明人: Jin-Chern Chiou , Chih-Wei Chang
- 申请人: Jin-Chern Chiou , Chih-Wei Chang
- 申请人地址: TW Hsinchu
- 专利权人: National Chiao Tung University
- 当前专利权人: National Chiao Tung University
- 当前专利权人地址: TW Hsinchu
- 代理机构: Rosenberg, Klein & Lee
- 优先权: TW96142516A 20071109
- 主分类号: G01D13/00
- IPC分类号: G01D13/00 ; G01R31/00
摘要:
The present invention discloses a three-dimensional microprobe array assembly structure, wherein spacers are used in assembling edge-type microprobe arrays to form a three-dimensional structure, and the spacers reveal conductive pads of the edge-type microprobe arrays to benefit wire bonding. The present invention detects depths and angles and thus increases detection reliability. Besides, in the present invention, the related IC is integrated with the spacer to achieve circuit integration and reduce cost.
公开/授权文献
- US20090120216A1 THREE-DIMENSIONAL MICROPROBE ARRAY 公开/授权日:2009-05-14
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