A process for producing an electrophotographic roller member comprising a roller base member having a conductive mandrel and an elastic layer, and a film on the elastic layer. The process comprises the step of forming the film by plasma CVD. The step comprises the steps of: placing the roller base member in a chamber in such a way that the distance between the surface of the elastic layer and flat-plate electrodes is 20 mm or more to 100 mm or less; feeding a source gas into the chamber so as to have a pressure of from 13.3 Pa or more to 666.6 Pa or less; and applying to an electrode an electric power of from 0.3 W/cm2 or more to 2.0 W/cm2 or less while rotating the roller base member so that the peripheral speed of from 6 mm/s or more to 170 mm/s or less.