发明授权
- 专利标题: Multi-layered, vertically stacked non-volatile memory device and method of fabrication
- 专利标题(中): 多层垂直堆叠的非易失性存储器件和制造方法
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申请号: US12484339申请日: 2009-06-15
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公开(公告)号: US07948024B2公开(公告)日: 2011-05-24
- 发明人: Suk-pil Kim , Yoon-dong Park , June-mo Koo , Tae-eung Yoon
- 申请人: Suk-pil Kim , Yoon-dong Park , June-mo Koo , Tae-eung Yoon
- 申请人地址: KR Suwon-si, Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si, Gyeonggi-do
- 代理机构: Volentine & Whitt, PLLC
- 优先权: KR10-2008-0067766 20080711
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A nonvolatile memory device is provided that includes; a first semiconductor layer extending in a first direction, a second semiconductor layer extending in parallel with and separated from the first semiconductor layer, an isolation layer between the first semiconductor layer and second semiconductor layer, a first control gate electrode between the first semiconductor layer and the isolation layer, a second control gate electrode between the second semiconductor layer and the isolation layer, wherein the second control gate electrode and first control gate electrode are respectively disposed at opposite sides of the isolation layer, a first charge storing layer between the first control gate electrode and the first semiconductor layer, and a second charge storing layer between the second control gate electrode and the second semiconductor layer.
公开/授权文献
- US20100006919A1 NON-VOLATILE MEMORY DEVICE AND METHOD OF FABRICATION 公开/授权日:2010-01-14
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