发明授权
- 专利标题: Core-shell nanowire transistor
- 专利标题(中): 核壳纳米线晶体管
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申请号: US11622358申请日: 2007-01-11
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公开(公告)号: US07948050B2公开(公告)日: 2011-05-24
- 发明人: Joerg Appenzeller , Supratik Guha , Emanuel Tutuc
- 申请人: Joerg Appenzeller , Supratik Guha , Emanuel Tutuc
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 Vazken Alexanian
- 主分类号: H01L31/06
- IPC分类号: H01L31/06
摘要:
A semiconductor structure is provided, which includes multiple sections arranged along a longitudinal axis. Preferably, the semiconductor structure comprises a middle section and two terminal sections located at opposite ends of the middle section. A semiconductor core having a first dopant concentration preferably extends along the longitudinal axis through the middle section and the two terminal sections. A semiconductor shell having a second, higher dopant concentration preferably encircles a portion of the semiconductor core at the two terminal sections, but not at the middle section, of the semiconductor structure. It is particularly preferred that the semiconductor structure is a nanostructure having a cross-sectional dimension of not more than 100 nm.
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