发明授权
US07948675B2 Surface-corrected multilayer-film mirrors with protected reflective surfaces, exposure systems comprising same, and associated methods
有权
具有受保护反射表面的表面校正多层膜反射镜，包括其的曝光系统以及相关方法
- 专利标题： Surface-corrected multilayer-film mirrors with protected reflective surfaces, exposure systems comprising same, and associated methods
- 专利标题（中）： 具有受保护反射表面的表面校正多层膜反射镜，包括其的曝光系统以及相关方法
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申请号： US12070622申请日： 2008-02-19
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公开(公告)号： US07948675B2公开(公告)日： 2011-05-24
- 发明人: Masayuki Shiraishi
- 申请人： Masayuki Shiraishi
- 申请人地址： JP Tokyo
- 专利权人： Nikon Corporation
- 当前专利权人： Nikon Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Klarquist Sparkman, LLP
- 优先权： JPP2005-295856 20051011; JPP2007-042385 20070222
- 主分类号： G02B5/08
- IPC分类号： G02B5/08
摘要：
Multilayer-film reflective mirrors are disclosed that exhibit desired optical characteristics and resistance to reflective-surface degradation. An exemplary multilayer-film mirror includes a base and a multilayer film on the base. The multilayer film is made of first and second layers alternatingly laminated at a prescribed period length. The surface of the multilayer film has an irregular surface profile, relative to the surface profile of the base. The multilayer film reflects incident extreme ultraviolet (EUV) light. A third layer, situated on and covering the surface of the multilayer film, is formed of a substance having substantially the same refractive index to EUV light as the refractive index of a vacuum. The third layer has a surface profile substantially the same as the surface contour of the base. The third layer is covered with a protective layer.
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