发明授权
- 专利标题： Method and apparatus for automatically detecting and correcting misalignment of a semiconductor chip
- 专利标题（中）： 用于自动检测和校正半导体芯片的未对准的方法和装置
-
申请号： US11437456申请日： 2006-05-19
-
公开(公告)号： US07949436B2公开(公告)日： 2011-05-24
- 发明人: Robert J. Drost , Ronald Ho , David C. Douglas
- 申请人： Robert J. Drost , Ronald Ho , David C. Douglas
- 申请人地址： US CA Redwood Shores
- 专利权人： Oracle America, Inc.
- 当前专利权人： Oracle America, Inc.
- 当前专利权人地址： US CA Redwood Shores
- 代理机构： Park, Vaughan, Fleming & Dowler LLP
- 主分类号： G05D1/02
- IPC分类号： G05D1/02
摘要：
One embodiment of the present invention provides a system that automatically detects and corrects a misalignment of a semiconductor chip. During operation, the system uses a position-detection mechanism integrated with the chip to determine the misalignment of the chip from a desired alignment for the chip. Next, the system uses an actuation mechanism integrated with the chip to automatically correct the misalignment, thereby improving performance and reliability of the chip.
公开/授权文献
信息查询
