发明授权
- 专利标题: Methods of forming electrically conductive structures
- 专利标题(中): 形成导电结构的方法
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申请号: US12052039申请日: 2008-03-20
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公开(公告)号: US07951414B2公开(公告)日: 2011-05-31
- 发明人: Nishant Sinha
- 申请人: Nishant Sinha
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Wells St. John P.S.
- 主分类号: B05D5/12
- IPC分类号: B05D5/12
摘要:
Some embodiments include methods of forming conductive material within high aspect ratio openings and low aspect ratio openings. Initially, the high aspect ratio openings may be filled with a first conductive material while the low aspect ratio openings are only partially filled with the first conductive material. Additional material may then be selectively plated over the first conductive material within the low aspect ratio openings relative to the first conductive material within the high aspect ratio openings. In some embodiments, the additional material may be activation material that only partially fills the low aspect ratio opening, and another conductive material may be subsequently plated onto the activation material to fill the low aspect ratio openings.
公开/授权文献
- US20090238958A1 Methods of Forming Electrically Conductive Structures 公开/授权日:2009-09-24
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