发明授权
US07955649B2 Forming thin films using a resealable vial carrier of amphiphilic molecules
有权
使用两亲分子的可重新密封的小瓶载体形成薄膜
- 专利标题: Forming thin films using a resealable vial carrier of amphiphilic molecules
- 专利标题(中): 使用两亲分子的可重新密封的小瓶载体形成薄膜
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申请号: US12014933申请日: 2008-01-16
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公开(公告)号: US07955649B2公开(公告)日: 2011-06-07
- 发明人: Brij Pal Singh
- 申请人: Brij Pal Singh
- 申请人地址: US OH North Royalton
- 专利权人: Visichem Technology, Ltd.
- 当前专利权人: Visichem Technology, Ltd.
- 当前专利权人地址: US OH North Royalton
- 代理机构: Fay Sharpe LLP
- 主分类号: C23C16/455
- IPC分类号: C23C16/455
摘要:
A method of forming a thin film of amphiphilic molecules on a substrate by using a resealable vial carrier is provided. The method includes placing the substrate in a vacuum chamber. A resealable cap member of the vial carrier is opened. The vial carrier may contain a liquid or solid amphiphilic material. The open vial carrier is placed within the chamber. The chamber is sealed and a pressure from about 2×10+2 to 5×10−6 torr is applied to the chamber. The vial carrier is heated to a temperature between 100-350° C. The amphiphilic material is vaporized in the chamber. A thin film of amphiphilic molecules is formed on the substrate. The chamber is opened and the substrate having the thin film of amphiphilic molecules thereon is removed. The resealable vial carrier includes a temperature resilient vial carrier and a resealable member selectively disposed about an opening of the vial carrier. The vial carrier contains a heat vaporizable amphiphilic material for direct use in forming a thin film coating on a substrate in a vacuum chamber.
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