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US07955693B2 Foam composition roller brush with embedded mandrel 失效
泡沫组合辊刷带嵌入式心轴

Foam composition roller brush with embedded mandrel
摘要:
The invention is directed toward a chemical mechanical polishing/planarizing (CMP) brush with an embedded mandrel. PVA foam injected into the substantially hollow mandrel expands through apertures in the mandrel to fill a mold in the desired shape of the brush with the foam in the mandrel being integral with the outer foam covering the brush.
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