发明授权
- 专利标题: Method of producing semiconductor optical device
- 专利标题(中): 制造半导体光学器件的方法
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申请号: US12481870申请日: 2009-06-10
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公开(公告)号: US07955880B2公开(公告)日: 2011-06-07
- 发明人: Toshio Nomaguchi , Tetsuya Hattori , Kazunori Fujimoto
- 申请人: Toshio Nomaguchi , Tetsuya Hattori , Kazunori Fujimoto
- 申请人地址: JP Osaka
- 专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: JP Osaka
- 代理机构: Smith, Gambrell & Russell, LLP
- 优先权: JP2008-162219 20080620
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A method of producing a semiconductor optical device includes a first step of growing a stacked semiconductor layer including a first III-V group compound semiconductor layer for an active layer on a substrate; a second step of forming a silicon oxide film on the stacked semiconductor layer, the silicon oxide film having a predetermined film stress and a predetermined thickness; a third step of forming a strip-shaped groove in the silicon oxide film by etching the silicon oxide film, using a resist pattern formed on the silicon oxide film, until a surface of the stacked semiconductor layer is exposed; and a fourth step of growing a second III-V group compound semiconductor layer in the groove using the silicon oxide film as a selective mask.
公开/授权文献
- US20090317929A1 METHOD OF PRODUCING SEMICONDUCTOR OPTICAL DEVICE 公开/授权日:2009-12-24
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