发明授权
- 专利标题: Method and apparatus for fabricating a carbon nanotube transistor
- 专利标题(中): 用于制造碳纳米管晶体管的方法和装置
-
申请号: US12727753申请日: 2010-03-19
-
公开(公告)号: US07955931B2公开(公告)日: 2011-06-07
- 发明人: Joerg Appenzeller , Phaedon Avouris , Yu-Ming Lin
- 申请人: Joerg Appenzeller , Phaedon Avouris , Yu-Ming Lin
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L21/8236
- IPC分类号: H01L21/8236 ; H01L21/336
摘要:
A method of fabricating a nanotube field-effect transistor having unipolar characteristics and a small inverse sub-threshold slope includes forming a local gate electrode beneath the nanotube between drain and source electrodes of the transistor and doping portions of the nanotube. In a further embodiment, the method includes forming at least one trench in the gate dielectric (e.g., a back gate dielectric) and back gate adjacent to the local gate electrode. Another aspect of the invention is a nanotube field-effect transistor fabricated using such a method.
公开/授权文献
信息查询
IPC分类: