发明授权
- 专利标题: Polymerizable sulfonic acid onium salt and resin
- 专利标题(中): 可聚合的磺酸鎓盐和树脂
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申请号: US12514168申请日: 2007-11-09
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公开(公告)号: US07956142B2公开(公告)日: 2011-06-07
- 发明人: Tomoki Nagai , Takuma Ebata , Makoto Shimizu , Jonathan Joachim Jodry , Satoru Narizuka , Masaki Fujiwara
- 申请人: Tomoki Nagai , Takuma Ebata , Makoto Shimizu , Jonathan Joachim Jodry , Satoru Narizuka , Masaki Fujiwara
- 申请人地址: JP Tokyo JP Yamaguchi
- 专利权人: JSR Corporation,Central Glass Co., Ltd.
- 当前专利权人: JSR Corporation,Central Glass Co., Ltd.
- 当前专利权人地址: JP Tokyo JP Yamaguchi
- 代理机构: Ditthavong Mori & Steiner, P.C.
- 优先权: JP2006-305842 20061110
- 国际申请: PCT/JP2007/071849 WO 20071109
- 国际公布: WO2008/056795 WO 20080515
- 主分类号: C08F128/02
- IPC分类号: C08F128/02
摘要:
A resin that includes a repeating unit shown by the following formula (10) has an excellent performance as a radiation sensitive acid generator, and exhibits only a small adverse effect on the environment and a human body. wherein R1 represents a hydrogen atom or the like, M+ represents a specific cation, and n is an integer from 1 to 5.
公开/授权文献
- US20100063232A1 POLYMERIZABLE SULFONIC ACID ONIUM SALT AND RESIN 公开/授权日:2010-03-11