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US07956142B2 Polymerizable sulfonic acid onium salt and resin 有权
可聚合的磺酸鎓盐和树脂

Polymerizable sulfonic acid onium salt and resin
摘要:
A resin that includes a repeating unit shown by the following formula (10) has an excellent performance as a radiation sensitive acid generator, and exhibits only a small adverse effect on the environment and a human body. wherein R1 represents a hydrogen atom or the like, M+ represents a specific cation, and n is an integer from 1 to 5.
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