发明授权
US07956512B2 Surface acoustic wave device including an IDT formed by a metal filled in grooves on a piezoelectric substrate
有权
表面声波装置包括由填充在压电基板上的凹槽中的金属形成的IDT
- 专利标题： Surface acoustic wave device including an IDT formed by a metal filled in grooves on a piezoelectric substrate
- 专利标题（中）： 表面声波装置包括由填充在压电基板上的凹槽中的金属形成的IDT
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申请号： US12825520申请日： 2010-06-29
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公开(公告)号： US07956512B2公开(公告)日： 2011-06-07
- 发明人: Michio Kadota , Tetsuya Kimura
- 申请人： Michio Kadota , Tetsuya Kimura
- 申请人地址： JP Kyoto
- 专利权人： Murata Manufacturing Co., Ltd.
- 当前专利权人： Murata Manufacturing Co., Ltd.
- 当前专利权人地址： JP Kyoto
- 代理机构： Keating & Bennett, LLP
- 优先权： JP2008-008350 20080117; JP2008-207765 20080812; JP2008-279941 20081030
- 主分类号： H01L41/04
- IPC分类号： H01L41/04 ; H03H9/25
摘要：
A surface acoustic wave device includes a LiNbO3 substrate and is constructed such that the reflection coefficient of an IDT is not only high but the electromechanical coupling coefficient K2 is also high, and the range of Euler angles of the LiNbO3 substrate can be increased to realize a wide range of the electromechanical coupling coefficient K2. A plurality of grooves are provided in an upper surface of the LiNbO3 substrate, an IDT including a plurality of electrode fingers is provided by filling a metal material in the plurality of grooves, and the metal material is Pt or W or an alloy primarily including at least one Pt or W.
公开/授权文献
- US20100259129A1 SURFACE ACOUSTIC WAVE DEVICE 公开/授权日：2010-10-14
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