发明授权
- 专利标题: Apparatus for cooling
- 专利标题(中): 冷却装置
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申请号: US11281901申请日: 2005-11-18
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公开(公告)号: US07956982B2公开(公告)日: 2011-06-07
- 发明人: Sven Antoin Johan Hol , Angelo Cesar Peter De Klerk , Erik Roelof Loopstra , Fransicus Mathijs Jacobs , Mark Scholten
- 申请人: Sven Antoin Johan Hol , Angelo Cesar Peter De Klerk , Erik Roelof Loopstra , Fransicus Mathijs Jacobs , Mark Scholten
- 申请人地址: NL Veldhoven
- 专利权人: ASML Netherlands B.V.
- 当前专利权人: ASML Netherlands B.V.
- 当前专利权人地址: NL Veldhoven
- 代理机构: Pillsbury Winthrop Shaw Pittman LLP
- 主分类号: G03B27/52
- IPC分类号: G03B27/52 ; G03B27/42 ; G03B27/58 ; G03B27/62 ; H02K41/02
摘要:
A cooling apparatus is described that has a first cooling structure, in thermal contact with a heat source having a temperature greater than a cool structure, including a channel through which a cooling fluid is passed, an isolator between the heat source and the cool structure, the isolator in thermal contact with the first cooling structure and including a material of low thermal conductivity, and a second cooling structure between the isolator and the cool structure, the second cooling structure including a channel through which cooling fluid is passed.
公开/授权文献
- US20070114655A1 Apparatus for cooling 公开/授权日:2007-05-24
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