发明授权
- 专利标题: Resistivity testing method and device therefor
- 专利标题(中): 电阻率测试方法及其设备
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申请号: US12934717申请日: 2009-07-02
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公开(公告)号: US07956999B2公开(公告)日: 2011-06-07
- 发明人: Satoshi Sakai , Akemi Takano , Yasuyuki Kobayashi , Kengo Yamaguchi
- 申请人: Satoshi Sakai , Akemi Takano , Yasuyuki Kobayashi , Kengo Yamaguchi
- 申请人地址: JP
- 专利权人: Mitsubishi Heavy Industries, Ltd.
- 当前专利权人: Mitsubishi Heavy Industries, Ltd.
- 当前专利权人地址: JP
- 代理机构: Kanesaka Berner and Partners LLP
- 优先权: JP2008-207062 20080811
- 国际申请: PCT/JP2009/062117 WO 20090702
- 国际公布: WO2010/018717 WO 20100218
- 主分类号: G01J4/00
- IPC分类号: G01J4/00 ; G01B11/28
摘要:
An object is to efficiently measure the resistivity of a transparent conductive film with high accuracy in a non-destructive and non-contact manner. Provided is a resistivity testing device that includes a light emitting device that emits p-polarized emission light having a wavelength selected by a preliminarily performed test-condition selecting method toward a transparent conductive film, formed on a light-transmissive substrate conveyed along a manufacturing line, from a film-surface side at an incidence angle selected by the method; a light detecting device that detects reflected light reflected at the transparent conductive film; and an information processor that calculates an evaluation value related to the amount of light of the reflected light with respect to the wavelength on the basis of the intensity of the detected light and obtains a resistivity from the calculated evaluation value by using a correlation characteristic in which the evaluation value and the resistivity are associated with each other in advance.
公开/授权文献
- US20110019190A1 RESISTIVITY TESTING METHOD AND DEVICE THEREFOR 公开/授权日:2011-01-27
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