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US07958788B2 Piezoelectric vibrating beam force sensor 失效
压电式振动力传感器

Piezoelectric vibrating beam force sensor
Abstract:
A force sensor (10) is forced from a vibrating beam (11), an excitation piezoelectric device (12) to cause a vibration in the beam at its resonate frequency and a measurement piezoelectric device (12) to measure the frequencies being indication of the force applied to the beam (11). The excitation and measurement piezoelectric devices (12) are attached to the beam adjacent to each other at one end of the beam (11).
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