发明授权
- 专利标题： Cooled backing plate for a sputtering target, and sputtering target comprising a plurality of backing plates
- 专利标题（中）： 用于溅射靶的冷却背板，以及包括多个背板的溅射靶
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申请号： US12323287申请日： 2008-11-25
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公开(公告)号： US07959776B2公开(公告)日： 2011-06-14
- 发明人: Jörg Krempel-Hesse , Andreas Jischke , Uwe Schüβler , Hans Wolf
- 申请人： Jörg Krempel-Hesse , Andreas Jischke , Uwe Schüβler , Hans Wolf
- 申请人地址： DE Alzenau
- 专利权人： Applied Films GmbH & Co.
- 当前专利权人： Applied Films GmbH & Co.
- 当前专利权人地址： DE Alzenau
- 代理机构： Ballard Spahr LLP
- 优先权： EP04027573 20041119
- 主分类号： C23C14/34
- IPC分类号： C23C14/34
摘要：
Claimed is a sputtering target system comprising a plurality of backing plates to be individually cooled. Each backing plate is provided on its back side with a meandering groove that is closed off by a sealing plate. The sealing plate is welded around its circumference to the backing plate and at the same time is welded to at least one ridge located at a distance from the frame, which separates two grooved sections from one another. The sealing plate thus welded to the backing plate not only closes off the grooves to form a cooling channel, but also is used for reinforcement of the otherwise relatively flat backing plate.