发明授权
- 专利标题: Lithographic apparatus and device manufacturing method
- 专利标题(中): 平版印刷设备和器件制造方法
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申请号: US11316359申请日: 2005-12-23
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公开(公告)号: US07961291B2公开(公告)日: 2011-06-14
- 发明人: Erik Roelof Loopstra , Bernardus Antonius Johannes Luttikhuis
- 申请人: Erik Roelof Loopstra , Bernardus Antonius Johannes Luttikhuis
- 申请人地址: NL Veldhoven
- 专利权人: ASML Netherlands B.V.
- 当前专利权人: ASML Netherlands B.V.
- 当前专利权人地址: NL Veldhoven
- 代理机构: Pillsbury Winthrop Shaw Pittman LLP
- 主分类号: G03B27/42
- IPC分类号: G03B27/42 ; G03B27/62
摘要:
A lithographic apparatus includes an illumination system to condition a radiation beam, a patterning device support to support a patterning device in a projection plane, the patterning device to pattern the radiation beam, a substrate table to hold a substrate, a projection system to project the patterned beam onto the substrate, and an exchange device to exchange an exchangeable object with an exchangeable object support that holds the exchangeable object during projection. The exchange device includes a load unit and an unload unit that each have a holding device to hold an exchangeable object. The holding devices are positioned substantially adjacent to each other and configured to hold an exchangeable object in a plane substantially parallel to the plane in which the exchangeable object is held in the exchangeable object support during projection. The exchangeable object support exchanges an exchangeable object with each of the holding devices.
公开/授权文献
- US20070146678A1 Lithographic apparatus and device manufacturing method 公开/授权日:2007-06-28
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