发明授权
- 专利标题: Integrated absolute and differential pressure transducer
- 专利标题(中): 集成的绝对和差压传感器
-
申请号: US12353201申请日: 2009-01-13
-
公开(公告)号: US07962294B2公开(公告)日: 2011-06-14
- 发明人: Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
- 申请人: Paul Dozoretz , Youfan Gu , Garry Holcomb , Ole Wenzel
- 申请人地址: US MA Andover
- 专利权人: MKS Instruments, Inc
- 当前专利权人: MKS Instruments, Inc
- 当前专利权人地址: US MA Andover
- 代理机构: Cochran Freund & Young LLC
- 代理商 James R. Young
- 主分类号: G01F23/14
- IPC分类号: G01F23/14
摘要:
A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single integrated scale. The absolute pressure measurements and differential pressure measurements are obtained, and a correlation factor between the absolute pressure measurements and the differential pressure measurements is determined. The correlation factor is used to normalize the differential pressure measurements to virtual absolute pressure values on a common absolute pressure scale with the absolute pressure measurements. An absolute pressure profile over a wide pressure range includes the absolute pressure measurements in a portion of the range where the absolute pressure measurements are accurate, and it includes the virtual absolute pressure values in another portion of the range where the differential pressure measurements are accurate.
公开/授权文献
- US20090228219A1 INTEGRATED ABSOLUTE AND DIFFERENTIAL PRESSURE TRANSDUCER 公开/授权日:2009-09-10
信息查询