Invention Grant
US07964250B2 Flexible display device having enhanced thin film semiconductive layer and method of manufacture 有权
柔性显示装置具有增强的薄膜半导体层及其制造方法

Flexible display device having enhanced thin film semiconductive layer and method of manufacture
Abstract:
A manufacturing method for a flat panel display device includes forming a barrier layer on a flexible plastic substrate by RF sputtering, forming an amorphous silicon layer on the plastic substrate, and subjecting the amorphous silicon layer to a rapid heat treatment so as to thereby improve electrical characteristics and/or homogeneity of the amorphous silicon layer.
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