发明授权
- 专利标题: Method for manufacturing nitride semiconductor light-emitting element
- 专利标题(中): 氮化物半导体发光元件的制造方法
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申请号: US12264976申请日: 2008-11-05
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公开(公告)号: US07964424B2公开(公告)日: 2011-06-21
- 发明人: Kyozo Kanamoto , Katsuomi Shiozawa , Kazushige Kawasaki , Shinji Abe , Hitoshi Sakuma
- 申请人: Kyozo Kanamoto , Katsuomi Shiozawa , Kazushige Kawasaki , Shinji Abe , Hitoshi Sakuma
- 申请人地址: JP Tokyo
- 专利权人: Mitsubishi Electric Corporation
- 当前专利权人: Mitsubishi Electric Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Leydig, Voit & Mayer, Ltd.
- 优先权: JP2007-300602 20071120
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A method for manufacturing a nitride semiconductor light-emitting element comprises: forming a semiconductor laminated structure wherein an n-type nitride semiconductor epitaxial layer, an active layer, and a p-type nitride semiconductor epitaxial layer are laminated on a substrate; forming a p-type electrode having a first electrode layer containing Pd and a second electrode layer containing Ta on the p-type nitride semiconductor epitaxial layer; heat treating at a temperature between 400° C. and 600° C. in ambient containing oxygen after forming the p-type electrode; and forming a pad electrode containing Au on the p-type electrode after the heat treating.
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