发明授权
- 专利标题: Method of forming metal wiring of nonvolatile memory device
- 专利标题(中): 形成非易失性存储器件金属布线的方法
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申请号: US12345612申请日: 2008-12-29
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公开(公告)号: US07964491B2公开(公告)日: 2011-06-21
- 发明人: Yong Chul Shin , Tae Kyung Kim
- 申请人: Yong Chul Shin , Tae Kyung Kim
- 申请人地址: KR Icheon-si, Gyeonggi-do
- 专利权人: Hynix Semiconductor Inc.
- 当前专利权人: Hynix Semiconductor Inc.
- 当前专利权人地址: KR Icheon-si, Gyeonggi-do
- 代理机构: Lowe Hauptman Ham & Berner LLP
- 优先权: KR10-2008-6150 20080121; KR10-2008-75700 20080801
- 主分类号: H01L21/44
- IPC分类号: H01L21/44
摘要:
A method of forming metal wirings of a nonvolatile memory device include forming a first insulating layer over a semiconductor substrate including a first junction area and a second junction area, forming first and second contact holes through which the first and second junction areas are respectively exposed in the first insulating layer, forming first and second contact plugs within the first and second contact holes, etching a part of the second contact plug, thus forming a recess, forming a second insulating layer to fill the recess, forming a third insulating layer over the semiconductor substrate including the first and second insulating layers, forming a first trench through which the first contact plug is exposed a second trench through which the second contact plug is exposed by etching the third insulating layer, and forming first and second metal wirings within the first and second trenches, respectively.
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