发明授权
- 专利标题: Neutralization apparatus having minute electrode ion generation element
- 专利标题(中): 具有微电极离子产生元件的中和装置
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申请号: US12224564申请日: 2006-03-03
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公开(公告)号: US07965487B2公开(公告)日: 2011-06-21
- 发明人: Takafumi Seto , Makoto Hirasawa , Masaaki Tsuji , Akira Okuyama , Susumu Saito
- 申请人: Takafumi Seto , Makoto Hirasawa , Masaaki Tsuji , Akira Okuyama , Susumu Saito
- 申请人地址: JP Tokyo JP Tokyo
- 专利权人: FISA Corporation,National Institute of Advanced Industrial Science and Technology
- 当前专利权人: FISA Corporation,National Institute of Advanced Industrial Science and Technology
- 当前专利权人地址: JP Tokyo JP Tokyo
- 代理机构: Roylance, Abrams, Berdo & Goodman, LLP
- 国际申请: PCT/JP2006/304121 WO 20060303
- 国际公布: WO2007/102191 WO 20070913
- 主分类号: H02H3/00
- IPC分类号: H02H3/00 ; H02H3/04 ; G03G15/02
摘要:
A neutralization apparatus comprising an ion generation element employing a novel, high efficiency discharge system capable of generating high concentration ions with a low ozone concentration. In the neutralization apparatus, the ion generation element is a minute electrode ion generation element consisting of a discharge electrode and an induction electrode having minute protrusions arranged in one direction on a plane, and a thin dielectric film sandwiched between them. The ion generation element is constituted of a set of a minute electrode ion generation element for generating positive ions and a minute electrode ion generation element for generating negative ions, characterized in that at least one or more ion generating elements are disposed so that the plane including each discharge electrode is parallel with the direction of gas flow and discharge electrodes are arranged perpendicularly to the direction of gas flow, and balanced control of positive and negative ions can be carried out at a position on the downstream side of gas flow by regulating a voltage applied to the discharge electrode of the ion generation element.
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