发明授权
- 专利标题: Regeneration apparatus and regeneration method for electroless plating
- 专利标题(中): 化学镀再生设备和再生方法
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申请号: US12981943申请日: 2010-12-30
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公开(公告)号: US07968149B2公开(公告)日: 2011-06-28
- 发明人: Hidenori Takagami , Hiroshi Kawakami , Kazuhiko Kato
- 申请人: Hidenori Takagami , Hiroshi Kawakami , Kazuhiko Kato
- 申请人地址: JP Kobe-shi
- 专利权人: Murata Co., Ltd.
- 当前专利权人: Murata Co., Ltd.
- 当前专利权人地址: JP Kobe-shi
- 代理机构: Holtz, Holtz, Goodman & Chick, PC
- 优先权: JP2005-203266 20050712
- 主分类号: B01J49/00
- IPC分类号: B01J49/00
摘要:
A regeneration apparatus for an electroless plating solution, which includes a sensor for measuring the formation rate of phosphorous acid formed in a plating tank in response to a plating treatment, a split device for taking out a plating solution in the plating tank to transfer the plating solution to a first processing tank, a sensor for measuring the concentration of the phosphorous acid contained in the plating solution taken out, an addition device for supplying calcium carbonate or calcium hydroxide, an amount of which is required for producing a calcium phosphite from the phosphorous acid contained in the plating solution, to the first processing tank, a separation device for separating and removing the calcium phosphite produced in the first processing tank from the plating solution, and a return pump for transferring the plating solution from which the calcium phosphite has been separated and removed to the plating tank.
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