发明授权
- 专利标题: Corrosion resistant multilayer member
- 专利标题(中): 耐腐蚀多层构件
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申请号: US11550929申请日: 2006-10-19
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公开(公告)号: US07968205B2公开(公告)日: 2011-06-28
- 发明人: Hajime Nakano , Toshihiko Tsukatani , Takao Maeda
- 申请人: Hajime Nakano , Toshihiko Tsukatani , Takao Maeda
- 申请人地址: JP Tokyo
- 专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人: Shin-Etsu Chemical Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Westerman, Hattori, Daniels & Adrian, LLP
- 优先权: JP2005-307199 20051021
- 主分类号: B32B9/00
- IPC分类号: B32B9/00
摘要:
A corrosion resistant member to be exposed to a halogen-containing gas atmosphere or a halogen-containing gas plasma atmosphere, comprising a substrate and a plurality of layers deposited thereon including a layer of rare earth fluoride providing the outermost surface and a layer of rare earth oxide having a porosity of less than 5% underlying the rare earth fluoride layer.
公开/授权文献
- US20070111030A1 CORROSION RESISTANT MULTILAYER MEMBER 公开/授权日:2007-05-17