发明授权
- 专利标题: Thin-walled structures
- 专利标题(中): 薄壁结构
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申请号: US12237469申请日: 2008-09-25
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公开(公告)号: US07968359B2公开(公告)日: 2011-06-28
- 发明人: Stephen D. Hersee
- 申请人: Stephen D. Hersee
- 申请人地址: US NM Albuquerque
- 专利权人: STC.UNM
- 当前专利权人: STC.UNM
- 当前专利权人地址: US NM Albuquerque
- 代理机构: MH2 Technology Law Group LLP
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
Various embodiments provide thin-walled structures and methodologies for their formation. In one embodiment, the thin-walled structure can be formed by disposing a semiconductor material in a patterned aperture using a selective growth mask that includes a plurality of patterned apertures, followed by a continuous growth of the semiconductor material using a pulsed growth mode. The patterned aperture can include at least one lateral dimension that is small enough to allow a threading defect termination at sidewall(s) of the formed thin-walled structure. In addition, high-quality III-N substrate structures and core-shell MQW active structures can be formed from the thin-walled structures for use in devices like light emitting diodes (LEDs), lasers, or high electron mobility transistors (HEMTs).
公开/授权文献
- US20100276664A1 THIN-WALLED STRUCTURES 公开/授权日:2010-11-04
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