Invention Grant
- Patent Title: Thin-walled structures
- Patent Title (中): 薄壁结构
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Application No.: US12237469Application Date: 2008-09-25
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Publication No.: US07968359B2Publication Date: 2011-06-28
- Inventor: Stephen D. Hersee
- Applicant: Stephen D. Hersee
- Applicant Address: US NM Albuquerque
- Assignee: STC.UNM
- Current Assignee: STC.UNM
- Current Assignee Address: US NM Albuquerque
- Agency: MH2 Technology Law Group LLP
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Various embodiments provide thin-walled structures and methodologies for their formation. In one embodiment, the thin-walled structure can be formed by disposing a semiconductor material in a patterned aperture using a selective growth mask that includes a plurality of patterned apertures, followed by a continuous growth of the semiconductor material using a pulsed growth mode. The patterned aperture can include at least one lateral dimension that is small enough to allow a threading defect termination at sidewall(s) of the formed thin-walled structure. In addition, high-quality III-N substrate structures and core-shell MQW active structures can be formed from the thin-walled structures for use in devices like light emitting diodes (LEDs), lasers, or high electron mobility transistors (HEMTs).
Public/Granted literature
- US20100276664A1 THIN-WALLED STRUCTURES Public/Granted day:2010-11-04
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