发明授权
- 专利标题: Spatial light modulator and mirror device
- 专利标题(中): 空间光调制器和镜装置
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申请号: US12384021申请日: 2009-03-30
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公开(公告)号: US07969395B2公开(公告)日: 2011-06-28
- 发明人: Naoya Sugimoto , Yoshihiro Maeda , Fusao Ishii
- 申请人: Naoya Sugimoto , Yoshihiro Maeda , Fusao Ishii
- 申请人地址: JP JP
- 专利权人: Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- 当前专利权人: Silicon Quest Kabushiki-Kaisha,Olympus Corporation
- 当前专利权人地址: JP JP
- 代理商 Bo-In Lin
- 主分类号: G09G3/34
- IPC分类号: G09G3/34 ; G09G3/20 ; G02B26/00
摘要:
The present invention discloses a spatial light modulator includes a plurality of pixel elements disposed on a substrate. Each of the pixel elements comprises a deflectable micromirror. Specifically, instead of SRAM, the spatial light modulator is implemented with a DRAM in each of the pixel elements. The DRAM in each of the pixel elements has a smaller number of transistors than SRAM. The spatial light modulator can be manufactured with smaller pixel size and circuit configuration with improved withstand voltage. Further improvements can also be achieved for manufactured the spatial light modulator with smaller capacitor with better layout configuration for wire connections and control signal transmissions.
公开/授权文献
- US20090225237A1 Spatial light modulator and mirror device 公开/授权日:2009-09-10
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