Invention Grant
- Patent Title: Method of fabrication of heterogeneous integrated circuits and devices thereof
- Patent Title (中): 异质集成电路的制造方法及其装置
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Application No.: US12365112Application Date: 2009-02-03
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Publication No.: US07972936B1Publication Date: 2011-07-05
- Inventor: Peter D. Brewer , Andrew T. Hunter , Yakov Royter
- Applicant: Peter D. Brewer , Andrew T. Hunter , Yakov Royter
- Applicant Address: US CA Malibu
- Assignee: HRL Laboratories, LLC
- Current Assignee: HRL Laboratories, LLC
- Current Assignee Address: US CA Malibu
- Agency: Christie, Parker, Hale
- Main IPC: H01L21/30
- IPC: H01L21/30
Abstract:
A heterogeneous integrated circuit and method of making the same. An integrated circuit includes a surrogate substrate including a material selected from the group consisting of Group II, Group III, Group IV, Group V, and Group VI materials and their combinations; at least one active semiconductor device including a material combination selected from the group consisting of Group IV-IV, Group III-V and Group II-VI materials; and at least one transferred semiconductor device including a material combination selected from the group consisting of Group IV-IV, Group III-V and Group II-VI materials. The at least one active semiconductor device and the at least one transferred device are interconnected.
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