发明授权
US07973289B2 Method for producing image contrast by phase shifting in electron optics
有权
用于通过电子光学中的相移产生图像对比度的方法
- 专利标题: Method for producing image contrast by phase shifting in electron optics
- 专利标题(中): 用于通过电子光学中的相移产生图像对比度的方法
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申请号: US12405279申请日: 2009-03-17
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公开(公告)号: US07973289B2公开(公告)日: 2011-07-05
- 发明人: Joachim Zach , Harald Rose
- 申请人: Joachim Zach , Harald Rose
- 申请人地址: DE Heidelberg
- 专利权人: CEOS Corrected Electron Optical Systems GmbH
- 当前专利权人: CEOS Corrected Electron Optical Systems GmbH
- 当前专利权人地址: DE Heidelberg
- 代理商 Paul Vincent
- 优先权: DE102009010774 20090226
- 主分类号: G01N23/00
- IPC分类号: G01N23/00
摘要:
According to the invention, the image contrast in electron optics can be improved without causing aberrations that are no longer tolerable by using, for production and correction of the at least one anamorphic image, quadrupole fields before and after this image whose extent in the direction of the optical axis is equal to at least twice their focal length, and wherein at least one of the axial rays, by an appropriate choice of the magnification M of the intermediate image, enters the quadrupole field before the at least one anamorphic image at a slope 1/M such that a length of the anamorphic image is achieved at which any aberrations caused are still within a tolerable range. The invention also relates to devices for implementing this method.
公开/授权文献
- US20100213369A1 Method 公开/授权日:2010-08-26
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