Invention Grant
US07973289B2 Method for producing image contrast by phase shifting in electron optics
有权
用于通过电子光学中的相移产生图像对比度的方法
- Patent Title: Method for producing image contrast by phase shifting in electron optics
- Patent Title (中): 用于通过电子光学中的相移产生图像对比度的方法
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Application No.: US12405279Application Date: 2009-03-17
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Publication No.: US07973289B2Publication Date: 2011-07-05
- Inventor: Joachim Zach , Harald Rose
- Applicant: Joachim Zach , Harald Rose
- Applicant Address: DE Heidelberg
- Assignee: CEOS Corrected Electron Optical Systems GmbH
- Current Assignee: CEOS Corrected Electron Optical Systems GmbH
- Current Assignee Address: DE Heidelberg
- Agent Paul Vincent
- Priority: DE102009010774 20090226
- Main IPC: G01N23/00
- IPC: G01N23/00

Abstract:
According to the invention, the image contrast in electron optics can be improved without causing aberrations that are no longer tolerable by using, for production and correction of the at least one anamorphic image, quadrupole fields before and after this image whose extent in the direction of the optical axis is equal to at least twice their focal length, and wherein at least one of the axial rays, by an appropriate choice of the magnification M of the intermediate image, enters the quadrupole field before the at least one anamorphic image at a slope 1/M such that a length of the anamorphic image is achieved at which any aberrations caused are still within a tolerable range. The invention also relates to devices for implementing this method.
Public/Granted literature
- US20100213369A1 Method Public/Granted day:2010-08-26
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