Invention Grant
- Patent Title: Lateral DMOS transistor and method for the production thereof
- Patent Title (中): 侧面DMOS晶体管及其制造方法
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Application No.: US11730514Application Date: 2007-04-02
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Publication No.: US07973333B2Publication Date: 2011-07-05
- Inventor: Franz Dietz , Volker Dudek , Thomas Hoffmann , Michael Graf , Stefan Schwantes
- Applicant: Franz Dietz , Volker Dudek , Thomas Hoffmann , Michael Graf , Stefan Schwantes
- Applicant Address: DE Heilbronn
- Assignee: Telefunken Semiconductors GmbH & Co. KG
- Current Assignee: Telefunken Semiconductors GmbH & Co. KG
- Current Assignee Address: DE Heilbronn
- Agency: Muncy, Geissler, Olds & Lowe, PLLC
- Priority: DE102004049246 20041001
- Main IPC: H01L29/66
- IPC: H01L29/66

Abstract:
A lateral DMOS-transistor is provided that includes a MOS-diode made of a semi-conductor material of a first type of conductivity, a source-area of a second type of conductivity and a drain-area of a second type of conductivity which is separated from the MOS-diode by a drift region made of a semi-conductor material of a second type of conductivity which is at least partially covered by a dielectric gate layer which also covers the semi-conductor material of the MOS-diode. The dielectric gate-layer comprises a first region of a first thickness and a second region of a second thickness. The first region covers the semi-conductor material of the MOS-diode and the second region is arranged on the drift region. A transition takes place from the first thickness to the second thickness such that an edge area of the drift region which is oriented towards the MOS-diode is arranged below the second area of the gate layer. The invention also relates to a method for the production of these types of DMOS-transistors.
Public/Granted literature
- US20070235779A1 Lateral DMOS transistor and method for the production thereof Public/Granted day:2007-10-11
Information query
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