发明授权
US07973351B2 Stack having Heusler alloy, magnetoresistive element and spin transistor using the stack, and method of manufacturing the same
有权
具有Heusler合金,磁阻元件和使用该堆叠的自旋晶体管的堆叠及其制造方法
- 专利标题: Stack having Heusler alloy, magnetoresistive element and spin transistor using the stack, and method of manufacturing the same
- 专利标题(中): 具有Heusler合金,磁阻元件和使用该堆叠的自旋晶体管的堆叠及其制造方法
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申请号: US12565303申请日: 2009-09-23
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公开(公告)号: US07973351B2公开(公告)日: 2011-07-05
- 发明人: Takao Marukame , Mizue Ishikawa , Tomoaki Inokuchi , Hideyuki Sugiyama , Yoshiaki Saito
- 申请人: Takao Marukame , Mizue Ishikawa , Tomoaki Inokuchi , Hideyuki Sugiyama , Yoshiaki Saito
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2008-246718 20080925
- 主分类号: H01L21/02
- IPC分类号: H01L21/02
摘要:
A stack includes a crystalline MgO layer, crystalline Heusler alloy layer, and amorphous Heusler alloy layer. The crystalline Heusler alloy layer is provided on the MgO layer. The amorphous Heusler alloy layer is provided on the crystalline Heusler alloy layer.
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