Invention Grant
- Patent Title: MEMS device with bi-directional element
- Patent Title (中): 具有双向元件的MEMS器件
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Application No.: US12732752Application Date: 2010-03-26
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Publication No.: US07973637B2Publication Date: 2011-07-05
- Inventor: Arman Gasparyan , John VanAtta Gates, II , Maria Elina Simon
- Applicant: Arman Gasparyan , John VanAtta Gates, II , Maria Elina Simon
- Applicant Address: US NJ Murray Hill
- Assignee: Alcatel-Lucent USA Inc.
- Current Assignee: Alcatel-Lucent USA Inc.
- Current Assignee Address: US NJ Murray Hill
- Agency: Hitt Gaines, P.C.
- Main IPC: H01H61/01
- IPC: H01H61/01

Abstract:
The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.
Public/Granted literature
- US20100182120A1 MEMS DEVICE WITH BI-DIRECTIONAL ELEMENT Public/Granted day:2010-07-22
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