Invention Grant
- Patent Title: Illumination system particularly for microlithography
- Patent Title (中): 照明系统特别适用于微光刻
-
Application No.: US12547135Application Date: 2009-08-25
-
Publication No.: US07977651B2Publication Date: 2011-07-12
- Inventor: Hans-Juergen Mann , Wolfgang Singer , Joerg Schultz , Johannes Wangler , Karl-Heinz Schuster , Udo Dinger , Martin Antoni , Wilhelm Ulrich
- Applicant: Hans-Juergen Mann , Wolfgang Singer , Joerg Schultz , Johannes Wangler , Karl-Heinz Schuster , Udo Dinger , Martin Antoni , Wilhelm Ulrich
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE19819898 19980505; DE19903807 19990202; DE29902108U 19990208; WOPCT/EP00/07258 20000720
- Main IPC: G01T1/20
- IPC: G01T1/20 ; A61N5/00

Abstract:
There is provided a projection objective for a projection exposure apparatus that has a primary light source for emitting electromagnetic radiation having a chief ray with a wavelength≦193 nm. The projection objective includes an object plane, a first mirror, a second mirror, a third mirror, a fourth mirror; and an image plane. The object plane, the first mirror, the second mirror, the third mirror, the fourth mirror and the image plane are arranged in a centered arrangement around a common optical axis. The first mirror, the second mirror, the third mirror, and the fourth mirror are situated between the object plane and the image plane. The chief ray, when incident on an object situated in the object plane, in a direction from the primary light source, is inclined away from the common optical axis.
Public/Granted literature
- US20090316128A1 ILLUMINATION SYSTEM PARTICULARLY FOR MICROLITHOGRAPHY Public/Granted day:2009-12-24
Information query