发明授权
- 专利标题: Substrate treatment apparatus and substrate treatment method
- 专利标题(中): 基板处理装置及基板处理方法
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申请号: US11694333申请日: 2007-03-30
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公开(公告)号: US07979942B2公开(公告)日: 2011-07-19
- 发明人: Nobuyasu Hiraoka , Tsuyoshi Okumura , Akiyoshi Nakano , Hajime Ugajin
- 申请人: Nobuyasu Hiraoka , Tsuyoshi Okumura , Akiyoshi Nakano , Hajime Ugajin
- 申请人地址: JP JP
- 专利权人: Dainippon Screen Mfg. Co., Ltd.,Sony Corporation
- 当前专利权人: Dainippon Screen Mfg. Co., Ltd.,Sony Corporation
- 当前专利权人地址: JP JP
- 代理机构: Ostrolenk Faber LLP
- 优先权: JP2006-095552 20060330; JP2006-095553 20060330; JP2006-095554 20060330
- 主分类号: B08B1/04
- IPC分类号: B08B1/04
摘要:
A substrate treatment apparatus including a substrate holding mechanism for holding a substrate; a first brush made of an elastically deformable material and having a cleaning surface inclined with respect to a perpendicular direction perpendicular to one surface of the substrate held by the substrate holding mechanism; a first brush moving mechanism for moving the first brush with respect to the substrate held by the substrate holding mechanism; a controller for controlling the first brush moving mechanism so that the cleaning surface is made to contact with a peripheral area on the one surface and a peripheral end face of the substrate held by the substrate holding mechanism; and a first pushing pressure holding mechanism for holding a pushing pressure of the first brush in the perpendicular direction to the peripheral area on the one surface of the substrate at a preset pushing pressure.
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