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US07980196B2 Apparatus and method for coating polyimide layer 有权
聚酰亚胺涂层的设备和方法

Apparatus and method for coating polyimide layer
Abstract:
An apparatus for coating a polyimide layer includes a printing table in which a substrate is provided, an inkjet head having an injection surface with nozzles for injecting a polyimide liquid onto the substrate, a polyimide liquid supply tank filled with the polyimide liquid, an ultrasonic cleaner in which a cleaning liquid for cleaning the inkjet head is stored for cleaning the inkjet head with vibrations in the cleaning liquid generated by applying an ultrasonic signal, and a wiper for wiping an injection surface of the inkjet head.
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