Invention Grant
- Patent Title: Apparatus and method for coating polyimide layer
- Patent Title (中): 聚酰亚胺涂层的设备和方法
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Application No.: US11647232Application Date: 2006-12-29
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Publication No.: US07980196B2Publication Date: 2011-07-19
- Inventor: Bong Chul Kim , Jun Beom Cho , Seung Hyung Lee , Kyo Yong Koo , Hyeon Jin Seo , Dhang Kwon , Robert Taff
- Applicant: Bong Chul Kim , Jun Beom Cho , Seung Hyung Lee , Kyo Yong Koo , Hyeon Jin Seo , Dhang Kwon , Robert Taff
- Applicant Address: KR Seoul JP Kanagawa-ken
- Assignee: LG Display Co., Ltd.,ULVAC, Inc.
- Current Assignee: LG Display Co., Ltd.,ULVAC, Inc.
- Current Assignee Address: KR Seoul JP Kanagawa-ken
- Agency: Morgan, Lewis & Bockius LLP
- Priority: KR10-2006-0055575 20060620
- Main IPC: B05C21/00
- IPC: B05C21/00

Abstract:
An apparatus for coating a polyimide layer includes a printing table in which a substrate is provided, an inkjet head having an injection surface with nozzles for injecting a polyimide liquid onto the substrate, a polyimide liquid supply tank filled with the polyimide liquid, an ultrasonic cleaner in which a cleaning liquid for cleaning the inkjet head is stored for cleaning the inkjet head with vibrations in the cleaning liquid generated by applying an ultrasonic signal, and a wiper for wiping an injection surface of the inkjet head.
Public/Granted literature
- US20070292627A1 Apparatus and method for coating polyimide layer Public/Granted day:2007-12-20
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