发明授权
- 专利标题： Ultrasound transducer manufactured by using micromachining process, its device, endoscopic ultrasound diagnosis system thereof, and method for controlling the same
- 专利标题（中）： 使用微加工工艺制造的超声换能器，其装置，内窥镜超声诊断系统及其控制方法
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申请号： US12763611申请日： 2010-04-20
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公开(公告)号： US07982362B2公开(公告)日： 2011-07-19
- 发明人: Hideo Adachi , Katsuhiro Wakabayashi , Akiko Mizunuma , Yukihiko Sawada , Takuya Imahashi , Takanao Fujimura , Ki Doh
- 申请人： Hideo Adachi , Katsuhiro Wakabayashi , Akiko Mizunuma , Yukihiko Sawada , Takuya Imahashi , Takanao Fujimura , Ki Doh
- 申请人地址： JP Tokyo
- 专利权人： Olympus Medical Systems Corp.
- 当前专利权人： Olympus Medical Systems Corp.
- 当前专利权人地址： JP Tokyo
- 代理机构： Scully, Scott, Murphy & Presser, P.C.
- 优先权： JP2006-057122 20060303
- 主分类号： H01L41/047
- IPC分类号： H01L41/047
摘要：
An ultrasound transducer manufactured by using a micromachining process comprises: a first electrode into which a control signal for transmitting ultrasound is input; a substrate on which the first electrode is formed; a second electrode that is a ground electrode facing the first electrode with a prescribed space between the first and second electrodes; a membrane on which the second electrode is formed and which vibrates and generates the ultrasound when a voltage is applied between the first and second electrodes; a piezoelectric film contacting the membrane; and a third electrode electrically continuous to the piezoelectric film.
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