Invention Grant
US07984649B2 Panel inspection apparatus and inspection method 有权
面板检查装置及检验方法

Panel inspection apparatus and inspection method
Abstract:
A panel inspection apparatus includes a resonant frequency extracting unit for extracting a plurality of resonant frequencies of a panel, a resonant frequency selecting unit for selecting a combination of resonant frequencies consisting of two resonant frequencies A and B with different vibration propagation paths among the extracted plurality of resonant frequencies, a non-defective range generating unit for generating a non-defective range on a coordinate system in which resonant frequencies A and B are taken on coordinate axes by statistically processing a set of the resonant frequencies A and B selected for each of a plurality of non-defective panels determined as non-defective in advance, and a panel quality determining unit for determining whether the quality of the panel to be inspected is good based on comparison between resonant frequencies A and B selected for the panel to be inspected and the non-defective range generated by the non-defective range generating unit.
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