发明授权
US07985942B2 Method of providing consistent quality of target material removal by lasers having different output performance characteristics
有权
通过具有不同输出性能特征的激光提供一致的目标材料去除质量的方法
- 专利标题: Method of providing consistent quality of target material removal by lasers having different output performance characteristics
- 专利标题(中): 通过具有不同输出性能特征的激光提供一致的目标材料去除质量的方法
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申请号: US11131432申请日: 2005-05-17
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公开(公告)号: US07985942B2公开(公告)日: 2011-07-26
- 发明人: Weisheng Lei , Glenn Simenson , Jeff Howerton , Mark Unrath
- 申请人: Weisheng Lei , Glenn Simenson , Jeff Howerton , Mark Unrath
- 申请人地址: US OR Portland
- 专利权人: Electro Scientific Industries, Inc.
- 当前专利权人: Electro Scientific Industries, Inc.
- 当前专利权人地址: US OR Portland
- 代理机构: Stoel Rives LLP
- 主分类号: B23K26/00
- IPC分类号: B23K26/00
摘要:
Laser pulse energy adjustments are motivated by an understanding of the effect of laser pulse width variations among different lasers on satisfying a quality metric associated with a laser-processed target. In a preferred embodiment, the adjustments normalize this effect among different lasers drilling vias in a target specimen. The number of pulses delivered to the target specimen to form each via can be modified, based on the pulse energy applied to the via location, to control different via quality metrics.
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